Introduction. Preface. 1. Improving Convention Scanning Probe Microscopes. 2. Design of Piezoresistive Cantilevers with Integrated Actuators. 3. Increasing the Speed of Imaging. 4. Cantilevers with Interdigital Deflection Sensors. 5. Operation of the Interdigital Cantilever. 6. Cantilever Arrays. 7. Scanning Probes for Information Storage and Retrieval. 8. Silicon Process Flow: ZnO Actuator and Piezoresistive Sensor. 9. Silicon Process Flow: Interdigital Cantilever.